Thin Film Analysis Techniques (MS319)

SynopsisThe characteristic of a thin film is closely related to its surface, near-surface, and bulk properties. Applications of thin film as an engineering material are determined by the properties and behaviours of the surface, near-surface, and bulk structures. It is therefore essential that these regions have the right conditions and properties in order for the thin film to perform its designated and specific task.

Failure of thin films will eventually lead to a loss of function or outright failure of engineering products. Such failure of thin films may be traced back to surface/near-surface contamination or an imperfect surface reconstruction. In order to obtain more information related to the failure, a clearer picture needs to be captured in these regions. This can be accomplished by means of various analysis techniques.

This course introduces the basic and important principles of thin film science, which serve as an essential foundation for studying the operational concepts and applications of several important thin film analysis techniques. The know-how of interpreting analysis output data will also be explained in an "easy-to-follow" and "easy-to-understand" manner.

Integrating all the above knowledge, the course will then continue to discuss the crucial skills of selecting an relevant analysis technique for solving practical engineering issues.

What You Will LearnUpon completion of this course, participants will be able to:

• Understand the fundamental concepts of thin film science.
• List down common techniques used for thin film analysis.
• Explain operation principles of those techniques.
• State advantages and limitations of a given analysis technique.
• Systematically identify and justify useful analytical technique for problem solving.

Who Should Attend

• Technicians, engineers, and researchers
• Decision makers, policy makers, and managers

PrerequisiteBasic technical background or working experience in a science or engineering discipline.

Course MethodologyThis course is conducted in a seminar room. Each participant will receive a set of course materials.

Course Duration3 days, 9am - 5pm

Course StructureDay 1

• Introduction to thin film science
• Fabrication of thin film
• Fundamental of thin film sciences
• Logical sequence of practical thin film analytical problem solving
• Group activity
• Electron Beam Techniques:

1. Electron Microscopy (EM)
2. Energy Dispersive X-ray (EDX)
3. Auger Electron Spectroscopy (AES)

• Electron Beam Techniques:

1. Electron Energy Loss Spectroscopy (EELS)

• Ion Beam Techniques:

1. Secondary Ion Mass Spectroscopy (SIMS)

• Group activity
• Ion Beam Techniques:

1. Rutherford Backscattering Spectrometry (RBS)

• X-Ray Techniques:

1. X-Ray Fluorescence (XRF)
2. X-Ray Photoelectron Spectroscopy (XPS)

• X-Ray Techniques:

1. X-Ray Diffraction (XRD)

• Scanning Probe Microscopy:

1. Atomic Force Microscopy (AFM)

• Optical Techniques:

1. Fourier Transform Infrared Spectroscopy (FTIR)

• Comparison of Various Surface Analysis Techniques
• Selection of Surface Analysis Techniques - A General Rule
• Case studies